In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process.

Autor: R. Bankras, J. Holleman, J. Schmitz, M. Sturm, A. Zinine, H. Wormeester, B. Poelsema
Zdroj: Chemical Vapor Deposition; May2006, Vol. 12 Issue 5, p275-279, 5p
Databáze: Complementary Index
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