| Autor: |
Brinkley, M. K., Powell, G. D., Aspnes, D. E. |
| Předmět: |
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| Zdroj: |
Applied Physics Letters; 5/15/2006, Vol. 88 Issue 20, p202112, 3p, 4 Graphs |
| Abstrakt: |
We describe a combinatorial approach for analyzing reflectance-difference/reflectance-anisotropy (RD/RA) spectra that avoids the need to establish null orientations experimentally, suppresses experimental artifacts, signal averages, and allows RD/RA spectra to be assessed systematically for secondary contributions at principal angles different from that of the dominant contribution. Application to rapid-thermal-annealed oxidized and nitrided vicinal (111) Si-dielectric interfaces demonstrates the effectiveness of the procedure. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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