Application of zero-temperature-gradient zero-bias thermally stimulated current spectroscopy to ultrathin high-dielectric-constant insulator film characterization.

Autor: Lau, W. S., Wong, K. F., Taejoon Han, Sandler, Nathan P.
Předmět:
Zdroj: Applied Physics Letters; 4/24/2006, Vol. 88 Issue 17, p172906, 3p, 1 Diagram, 4 Graphs
Abstrakt: Previously, we have reported our application of the zero-bias thermally stimulated current (ZBTSC) spectroscopy technique to study defect states in high-dielectric-constant insulator films such as tantalum oxide with much less parasitic current which can be a serious limitation for the conventional thermally stimulated current method. However, a parasitic current can still be observed for ZBTSC because of a small parasitic temperature gradient across the sample. The thermal design of the ZBTSC system can be improved, resulting in zero-temperature-gradient ZBTSC which can be used to detect deeper traps than those by ZBTSC. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index