| Autor: |
Ehmann, Thomas, Mantler, Claus, Jensen, Detlef, Neufang, Ralf |
| Předmět: |
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| Zdroj: |
Microchimica Acta; Apr2006, Vol. 154 Issue 1/2, p15-20, 6p, 1 Diagram, 3 Charts, 2 Graphs |
| Abstrakt: |
To manufacture 300 mm wafers, large quantities of ultra-pure water are required, which makes water the most important chemical used in this process. Therefore, its specification requiring ionic contaminants in the lower pg mL−1-concentration range is very strict. While inductively coupled plasma mass spectrometry (ICP-MS) is widely used for monitoring inorganic cations, ion chromatography (IC) is applied in the determination of ammonium and inorganic anions in the lower pg mL−1 range. For routine monitoring of both ammonium and inorganic cations and inorganic anions in the lower pg mL−1 range with online IC, gradient conditions were developed using the simulation software DryLab2000. The resulting methods were subsequently validated. The limit of quantification for a concentrated sample volume of 200 mL was statistically assessed at 1–2 pg mL−1 for ammonium and some alkaline/earth alkaline cations, and at 5–10 ng L−1 for inorganic anions, respectively. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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