Conduction mechanisms in Ta...O.../SiO... and Ta...O.../Si...N... stacked structures on Si.

Autor: Chaneliere, C., Autran, J. L.
Předmět:
Zdroj: Journal of Applied Physics; 7/1/1999, Vol. 86 Issue 1, p480, 7p, 3 Diagrams, 2 Charts, 10 Graphs
Abstrakt: Presents information on a study which investigated the conduction mechanism in tantalum oxide/silicon dioxide and tantalum oxide/silicon nitride stacked thin films on silicon. Experimental details; Simulation procedure; Expressions of the conduction mechanisms; Results and discussion; Conclusions.
Databáze: Complementary Index