A mechanically reliable digital-type single crystalline silicon (SCS) RF MEMS variable capacitor.
| Autor: | Jong-Man JK Kim, Sanghyo SL Lee, Jung-Mu JK Kim, Chang-Wook CB Baek, Youngwoo YK Kwon, Yong-Kweon YK Kim |
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| Zdroj: | Journal of Micromechanics & Microengineering; Oct2005, Vol. 15 Issue 10, p1854-1863, 10p |
| Databáze: | Complementary Index |
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