Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirror.

Autor: Fabien Parrain, Souhil Megherbi, Gilles Raynaud, Herv Mathias, Jean-Paul Gilles, Alain Bosseboeuf, Gerold Schrpfer, Nicolas Faure, Pierre Cusin
Zdroj: Microsystem Technologies; Dec2005, Vol. 12 Issue 1/2, p8-14, 7p
Abstrakt: Recent developments in micro-electro-mechanical systems and micromachining technologies have made possible the development and integration of micromirrors that can be employed for a number of consumer applications such as free space optical switching (Syms in J Lightwave Technol 20(7):10841094, 2002; Pan in Micromech Microeng 14(1):129137, 2004), 2D scanning or image projection (Texas Instruments DLP [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index