| Autor: |
Shodgrass, T. G., Snodgrass, T.G., Booske, J. H., Booske, J.H., Wang, W., Wendt, A. E., Wendt, A.E., Shohet, J. L., Shohel, J.L. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; Feb1999, Vol. 70 Issue 2, p1525, 5p, 3 Diagrams, 3 Graphs |
| Abstrakt: |
Describes the design and development of a quartz crystal microbalance analyzer which can be used to measure the ionized metal flux fraction arriving at the substrate location. Instrument design and principle of operation; Elimination of the grid components; Orientation of the magnetic field; Precision of the deposition rate. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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