Surface Kinetics and Uniformity Issues in Low-Temperature Epitaxy of Sige and Si:P Layers.
| Autor: | Smirnov, Andrey, Shustrov, Yury, Zimina, Daria, Galyukov, Alex |
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| Zdroj: | ECS Meeting Abstracts; 2024, Vol. MA2024 Issue 2, p2357-2357, 1p |
| Databáze: | Complementary Index |
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