Advanced atmospheric pressure CVD of a-Si:H using pure and cyclooctane-diluted trisilane as precursors.
| Autor: | Fischer, Benedikt, Nuys, Maurice, Astakhov, Oleksandr, Haas, Stefan, Schaa, Michael, Besmehn, Astrid, Jakes, Peter, Eichel, Rüdiger-A., Rau, Uwe |
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| Zdroj: | Sustainable Energy & Fuels; 12/7/2024, Vol. 8 Issue 23, p5568-5580, 13p |
| Databáze: | Complementary Index |
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