| Autor: |
Guilberteau, Théo, Balage, Pierre, Lafargue, Manon, Lopez, John, Gemini, Laura, Manek-Hönninger, Inka |
| Předmět: |
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| Zdroj: |
Micromachines; Nov2024, Vol. 15 Issue 11, p1313, 13p |
| Abstrakt: |
We investigate the elongated modifications resulting from a Bessel beam-shaped femtosecond laser in fused silica under three different operation modes, i.e., the single-pulse, MHz-burst, and GHz-burst regimes. The single-pulse and MHz-burst regimes show rather similar behavior in glass, featuring elongated and slightly tapered modifications. Subsequent etching with Potassium Hydroxide exhibits an etching rate and selectivity of up to 606 μ m/h and 2103:1 in single-pulse operation and up to 322 μ m/h and 2230:1 in the MHz-burst regime, respectively. Interestingly, in the GHz-burst mode, modification by a single burst of 50 pulses forms a taper-free hole without any etching. This constitutes a significant result paving the way for chemical-free, on-the-fly drilling of high aspect-ratio holes in glass. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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