基于改进 DDPG-PID 的芯片共晶键合温度控制.

Autor: 刘家池, 陈秀梅, 邓娅莉
Zdroj: Semiconductor Technology / Bandaoti Jishu; Nov2024, Vol. 49 Issue 11, p973-980, 8p
Databáze: Complementary Index