| Autor: |
Reddy, Busireddy Mahesh, Anitha, G. |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 2024, Vol. 2871 Issue 1, p1-8, 8p |
| Abstrakt: |
Utilizing silicon dioxide (SiO2) & aluminum oxide (Al2O3) as dielectric materials, the capacitance voltage properties of circular MEMS actuators will be modeled and assessed. With twenty people split evenly between the two groups, we are using a pretest power of 80% and an error rate of 0.05. Both dielectric materials had their capacitance voltages (CV) tested at both the pull-in & post-pull-in voltages, and the results are shown. The Al2O3 based MEMS actuator provides mean capacitance at below pull in state is found to be 6.81 x 10−11 F and capacitance at post pull in state is found to be 1.50 x 10−10 F, while the SiO2 based MEMS actuator provides mean capacitance at below pull in state is found to be 2.17 x 10−11 F and capacitance at post pull in state is found to be 4.39 x 10−11 F. The results show significance of 0.0001 (p < 0.05). The capacitance of Al2O3 dielectric material-based MEMS actuators is significantly higher than SiO2. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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