| Autor: |
Kodambaka, S., Bareño, J., Khare, S. V., Šwiȩch, W., Petrov, I., Greene, J. E. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 8/1/2005, Vol. 98 Issue 3, p034901, 5p, 1 Black and White Photograph, 4 Graphs |
| Abstrakt: |
We use in situ low-energy electron microscopy to investigate the near-equilibrium dynamics of TiN(111) steps, pinned by surface-terminated dislocations, as a function of N2 pressure pN2 and time during annealing of TiN(111) layers at temperatures T between 1600 and 1735 K. At each T, we observe the nucleation and growth of spiral steps rotating around dislocation cores. The spirals undergo a shape-preserving motion with a constant angular velocity ω as they grow inward, normal to the surface, forming vacancy pits. We find that ω for successive spirals emanating from the same source decreases slowly with time at all pN2 values between vacuum and 5×10-7 Torr. From the ω(T) data, we obtain an activation energy of 4.6±0.2 eV, irrespective of pN2, for the growth of spiral steps. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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