Control of ZIF‐62 and agZIF‐62 Film Thickness within Asymmetric Tubular Supports through Pressure and Dose Time Variation of Atomic Layer Deposition.

Autor: Stone, Dana M., Morgan, Sarah E., Abdelmigeed, Mai O., Nguyen, Jimmy, Bennett, Thomas D., Parsons, Gregory N., Cowan, Matthew G.
Zdroj: Small; 7/4/2024, Vol. 20 Issue 27, p1-6, 6p
Databáze: Complementary Index
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