Implementation of sub-100 nm vertical channel-all-around (CAA) thin-film transistor using thermal atomic layer deposited IGZO channel.
| Autor: | Yuting Chen, Xinlv Duan, Xueli Ma, Peng Yuan, Zhengying Jiao, Yongqing Shen, Liguo Chai, Qingjie Luan, Jinjuan Xiang, Di Geng, Guilei Wang, Chao Zhao |
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| Zdroj: | Semiconductor Technology; Jul2024, Vol. 45 Issue 7, p1-5, 5p |
| Databáze: | Complementary Index |
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