Investigation of an electrode-driven hydrogen plasma method for in situ cleaning of tin-based contamination.
| Autor: | PENG, Yichao, YE, Zongbiao, WANG, Sishu, PU, Guo, LIU, Xianyang, YUAN, Congcong, LIAO, Jiashu, WEI, Jianjun, YU, Xingang, GOU, Fujun |
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| Zdroj: | Plasma Science & Technology; Aug2024, Vol. 26 Issue 8, p1-11, 11p |
| Databáze: | Complementary Index |
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