Auto-Labeling for Pattern Recognition of Wafer Defect Maps in Semiconductor Manufacturing.
| Autor: | Fan, Shu-Kai S., Pei-Chen Chen, Chih-Hung Jen, Sethanan, Kanchana |
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| Zdroj: | Journal of Manufacturing Science & Engineering; Jul2024, Vol. 146 Issue 7, p1-11, 11p |
| Databáze: | Complementary Index |
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