Synthesis of pentameric chlorotin carboxylate clusters for high resolution EUV photoresists under small doses.
| Autor: | Cheng-Dun Li, Ting-An Lin, Po-Hsiung Chen, Tsai-Sheng Gau, Burn-Jeng Lin, Po-Wen Chiu, Jui-Hsiung Liu |
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| Zdroj: | Nanoscale Advances; 6/7/2024, Vol. 6 Issue 11, p2928-2944, 17p |
| Databáze: | Complementary Index |
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