Structural and gas sensing properties of barium titanate thick film.

Autor: Wahyuni, Yuli, Iskandar, Johan, Priandana, Karlisa, Irzaman
Předmět:
Zdroj: AIP Conference Proceedings; 2024, Vol. 3048 Issue 1, p1-6, 6p
Abstrakt: Ammonia (NH3) is a common air pollutant that can also be used to diagnose kidney disease. Therefore, the development of ammonia gas sensors is critical for health protection. This paper presents a simple method for fabricating an NH3 gas sensor that employs perovskite barium titanate (BaTiO3) as the active sensor material grown on a p-Si (100) silicon substrate. Barium titanate (BaTiO3) based thick films without (Pristine) and with lithium doping (Li-doped) were prepared by Chemical Solution Deposition (CSD) method and deposited on p-Si (100) substrate by spin coating. To study the structure properties of the resulting films, X-ray diffraction (XRD) characterization. These samples were made into gas sensors and tested under various conditions. At room temperature, the Li-doped film has a 44% higher responsivity for 100 ppm of NH3 than the undoped BaTiO3-based gas sensor. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index