Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction.

Autor:	Kornev, Roman, Gornushkin, Igor, Shabarova, Lubov, Kadomtseva, Alena, Mochalov, Georgy, Rekunov, Nikita, Romanov, Sergey, Medov, Vitaly, Belousova, Darya, Maleev, Nikita
Předmět:	WASTE minimization TETRACHLORIDES GERMANIUM ELECTRIC arc SILICON
Zdroj:	Sci; Mar2024, Vol. 6 Issue 1, p1, 12p
Abstrakt:	The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown. [ABSTRACT FROM AUTHOR]
Databáze:	Complementary Index
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