Atomic surface of quartz glass induced by photocatalytic green chemical mechanical polishing using the developed SiO2@TiO2 core-shell slurry.

Autor: Yuanhang Fan, Zhenyu Zhang, Jiaxin Yu, Xingqiao Deng, Chunjing Shi, Hongxiu Zhou, Fanning Meng, Junyuan Feng
Zdroj: Nanoscale Advances; 3/7/2024, Vol. 6 Issue 5, p1380-1391, 12p
Databáze: Complementary Index