Atomic Layer Deposition of NiO Using Different Precursors with Different Oxygen Sources.
| Autor: | Kannampalli, Vyshnav, Santinacci, Lionel, Dufond, Maxime E., Schmickler, Marcel, Devi, Anjana |
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| Zdroj: | ECS Meeting Abstracts; 2023, Vol. MA2023-02 Issue 1, p1488-1488, 1p |
| Databáze: | Complementary Index |
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