| Abstrakt: |
Comb-drive actuator is one of the most basic Microelectromechanical Systems (MEMS) designs. It usually used as linear actuators, utilizing electrostatic forces acting between two electrically conductive combs. The electrostatic forces are generated when a voltage between the static and moving combs is added, which allows them to be drawn together. The force produced by the actuator is proportional to the change in capacity between the two combs, which increases with the drive voltage, the number of fingers and the gap between the fingers. These are used for numerous uses including optical networking, biomedical technologies, cellular communication, and nanotechnology. In this work, the total displacement, total capacitance and equivalent stress were investigated and analyzed using ANSYS simulation software. The factors influencing the output results are the amount of force applied and the materials assigned to the design structure. For this project, the assigned materials were selected based on their elasticity. The materials assigned are polyethylene, stainless steel, titanium alloy and magnesium alloy. The input force that was applied during the simulation were varied but the range needs to be chosen within the distance between fingers in order to avoid it from crashing with each other. It is found that a maximum displacement of 0.96361 nm is produced from a maximum applied force of 0.00055 µN. The force applied is varied from 0.00030 µN to 0.00055 µN. The increase of force applied will produce higher displacement. From this maximum displacement, the maximum total capacitance can be obtained. The calculated maximum total capacitance is 0.0110 fF. It can be deduced that high force will contribute to high displacement and high total capacitance. The equivalent stress is also analyzed, and the result shown that the equivalent stress is directly proportional to the force. [ABSTRACT FROM AUTHOR] |
