Comparative research of mirror systems for extreme ultraviolet lithography illuminator.
| Autor: | Gao, Shan, Tsyganok, Elena A., Romanova, Galina E. |
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| Zdroj: | Proceedings of SPIE; 1/3/2024, Vol. 12765, p127650F-127650F-4, 1p |
| Databáze: | Complementary Index |
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