| Autor: |
Nguyen Minh QUANG, Nguyen Ngoc QUAN, Nguyen Trong MAI, Le Thi Phuong THANH, Nguyen Tien TUNG, Tran Ngoc TAN, Ha Thanh HAI, Nguyen Duy TRINH |
| Předmět: |
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| Zdroj: |
Journal of Machine Engineering; 2023, Vol. 23 Issue 4, p64-76, 13p |
| Abstrakt: |
A new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H2O2). The surface quality of Ti-6Al4V workpieces with the proposed chemical mechanical polishing slurry with optimal parameters include oxidizers (H2O2), colloidal (SiO2) slurry, and deionized water by weight 8%, 45%, and 47% respectively, the pH concentration is adjusted 4 through the malic acid content present in the slurry. Experimental results obtained with the proposed chemical mechanical polishing method show a more improved surface quality than previous studies when applying for polishing Ti-6Al-4V alloy. The developed chemical mechanical polishing method's polishing results under optimal conditions obtain an ultra-fine surface quality with Ra = 0.696 nm over a measuring area of 53×70 μm² . X-ray photoelectron (XPS) and electrochemical measurements were used to study the chemical reaction mechanisms in the proposed chemical mechanical polishing process. The chemical mechanical polishing processes for the surface of the Ti-6Al-4V alloy workpiece with the H2O2 oxidizing agent showed high suitability with the reactants formed on the surface such as Ti, V, and Al oxide. With the proposed oxidant and the established chemical mechanical polishing slurry, the feasibility and surface quality of the super smooth Ti-6Al-4V workpiece formed after polishing were demonstrated. The established chemical mechanical polishing method shows high applicability in environmental protection and Ti-6Al-4V alloy ultra-precision machining industries. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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