| Abstrakt: |
The inductively coupled plasma enhanced magnetron sputtering (ICPMS) is proposed by combining the magnetron sputtering and inductive coupling techniques, and it is used to prepare the high transmittance hydrophilic optical film. The optical and wetting properties, microscopic morphology, crystal structure and chemical composition were characterized by ultraviolet-infrared-visible spectrophotometer, water contact angle tester, scanning electron microscopy, X-ray diffractometry and X-ray energy spectrometry. The O/Mo ratio, optical transmittance and water contact angle of MoO3 films were used as the experimental indicators in the orthogonal test, in order to explore the influences of the inductively coupled plasma (ICP) oxygen to argon ratio, ICP power, target working pressure and ICP pre-treatment time on the optical and wetting properties. The results show that the influence degree order of the main parameters from strong to weak is ICP oxygen-to-argon ratio, target operating pressure, pre-treatment time and ICP power, and the optimum process parameters optimized are 400/300, 0.15 Pa, 1500 W and 18 min, in one-to-one correspondence. The research provides the specific process method and experimental basis for the preparation of high-quality MoO3 films and the potential application in the high transmittance hydrophilic optical film. [ABSTRACT FROM AUTHOR] |
