PEC-aware MPC for CD quality improvement.
| Autor: | Shin, Soeun, Lee, Boram, Lee, Sukho, Kim, Eok bong, Kim, Mina, Choi, Jin, Lee, Sanghee, Sato, Yutaro, Syukri, Ahmad, Ono, Itaru, Torigoe, Yohei |
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| Zdroj: | Proceedings of SPIE; 12/20/2023, Vol. 12751, p127510V-127510V-6, 1p |
| Databáze: | Complementary Index |
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