Experimental Determination of the Cathode Spot Motion Parameters during the Operation of a Vacuum-Arc Evaporator with an Arched Magnetic Field.

Autor: Kirillov, D. V., Tumanov, N. A., Riazanov, V. A., Pridatkin, F. P., Shimlykh, P. A., Novikov, D. O.
Zdroj: Russian Metallurgy (Metally); Jun2023, Vol. 2023 Issue 6, p767-772, 6p
Abstrakt: The dependences of the cathode spot velocity and the spot track width on the magnetic field on the cathode surface are determined. The parameters for vacuum arc evaporator cathodes made of a D16, VT1-0, or Ti–Al alloy are determined. The possibility of the influence of the parameters of the cathode zone motion on the erosion of the cathode is shown. The results obtained can be used to analyze the cathode erosion profile in arc evaporators with an arched magnetic field. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index
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