| Autor: |
Yasufumi Kawasuji, Yasuhiro Adachi, Kazuhiko Moro, Kouji Kakizaki, Masakazu Washio |
| Předmět: |
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| Zdroj: |
Journal of Laser Micro / Nanoengineering; Sep2023, Vol. 18 Issue 2, p83-86, 4p |
| Abstrakt: |
High-productivity fabrication of micro-vias in glass substrates is required for post-5G high-frequency signal interposers. This paper describes the fabrication of high-quality micro-vias with a high aspect ratio by ablation using a 248 nm excimer laser. To clarify the details of the ablation process, we investigate the surface microstructure generated by excimer laser irradiation. The results indicate that laser irradiation produces a surface microstructure that enhances the absorption of laser energy. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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