| Autor: |
Shetty, Satish, Kuchuk, Andrian, Zamani-Alavijeh, Mohammad, Hassan, Ayesha, Eisner, Savannah R., Maia de Oliveira, Fernando, Krone, Alexis, Harris, John, Thompson, Josh P., Eldose, Nirosh M., Mazur, Yuriy I., Huitink, David, Senesky, Debbie G., Alan Mantooth, H., Salamo, Gregory J. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 10/14/2023, Vol. 134 Issue 14, p1-9, 9p |
| Abstrakt: |
We investigated the thermal stability and performance of AlGaN/AlN/GaN Hall-effect sensors under industry-relevant atmospheric conditions. The thermal stability and performance of Hall sensors are evaluated by monitoring Hall sensitivity, two-dimensional electron gas density, and Ohmic contact resistance during aging at 200 °C for up to 2800 h under atmospheric conditions. This was accomplished by characterizing AlGaN/AlN/GaN micro-Hall sensors, with and without contacts, and before and after being placed under different thermal aging times. Observed electrical performance was correlated with the micro-structural evolution of AlGaN/AlN/GaN Hall sensor heterostructures. Results indicate that the AlGaN/AlN/GaN Hall sensor provides stable performance for as long as 2800 h aging at 200 °C without any significant degradation of (i) Hall sensitivity, (ii) two-dimensional electron gas, and (iii) Ohmic contacts. However, there was a small change in sheet density and mobility, which is due to a decrease in polarization, resulting from local inhomogeneous strain relief at the barrier layer. During the early stage of thermal aging, a decrease in contact resistance was also observed and attributed to (i) out-diffusion of "Ga" at the vicinity of the contact interface, and (ii) a reduction in oxygen concentration and formation of Al–Ti intermediate alloy at the GaN/Ti interface, resulting in a reduced barrier and enhanced electron transport at the contacts. However, despite these small changes, results indicate that the AlGaN/AlN/GaN Hall sensor provides stable performance for as long as 2800 h thermal aging at 200 °C. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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