Understanding the impact of rinse on SEM image distortion and hole patterning variability.
| Autor: | Soltani, Elvire, Le-Gratiet, Bertrand, Bérard-Bergery, Sébastien, Pradelles, Jonathan, Bourguignon, Thibaut, Le Pennec, Aurélie, Charras, Nathalie, Tiron, Raluca |
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| Zdroj: | Proceedings of SPIE; 2/9/2024, Vol. 12802, p1280209-1280209, 1p |
| Databáze: | Complementary Index |
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