Formation of modified Si/SiO... interfaces with intrinsic low defect concentrations.

Autor: Gosset, L.G., Ganem, J.J.
Předmět:
Zdroj: Journal of Applied Physics; 4/1/1999, Vol. 85 Issue 7, p3661, 5p, 1 Chart, 4 Graphs
Abstrakt: Studies the modification by postoxidation nitrogen oxide (NO) treatments of silicon/silicon dioxide interface. Application of nuclear reaction analysis in the study; Incorporation of NO molecules at the interface; Accomodation of the structural mismatch between the silicon lattice and the silicon dioxide layer; Results of the study.
Databáze: Complementary Index