Impact of Hydrogen Plasma on Electrical Properties and Deep Trap Spectra in Ga 2 O 3 Polymorphs.

Autor: Polyakov, Alexander Y., Yakimov, Eugene B., Nikolaev, Vladimir I., Pechnikov, Alexei I., Miakonkikh, Andrej V., Azarov, Alexander, Lee, In-Hwan, Vasilev, Anton A., Kochkova, Anastasiia I., Shchemerov, Ivan V., Kuznetsov, Andrej, Pearton, Stephen J.
Předmět:
Zdroj: Crystals (2073-4352); Sep2023, Vol. 13 Issue 9, p1400, 25p
Abstrakt: In this study, the results of hydrogen plasma treatments of β-Ga2O3, α-Ga2O3, κ-Ga2O3 and γ-Ga2O3 polymorphs are analyzed. For all polymorphs, the results strongly suggest an interplay between donor-like hydrogen configurations and acceptor complexes formed by hydrogen with gallium vacancies. A strong anisotropy of hydrogen plasma effects in the most thermodynamically stable β-Ga2O3 are explained by its low-symmetry monoclinic crystal structure. For the metastable, α-, κ- and γ-polymorphs, it is shown that the net result of hydrogenation is often a strong increase in the density of centers supplying electrons in the near-surface regions. These centers are responsible for prominent, persistent photocapacitance and photocurrent effects. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index