| Autor: |
Luo, Qianghui, Zhong, Jiaqiang, Miao, Wei, Li, Feiming, Wang, Qingcheng, Ding, Jiangqiao, Wu, Feng, Wang, Zheng, Zhou, Kangmin, Ren, Yuan, Zhang, Wen, Li, Jing, Shi, Shengcai |
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| Zdroj: |
Superconductor Science & Technology; Nov2023, Vol. 36 Issue 11, p1-9, 9p |
| Abstrakt: |
In this paper, we report on the design, fabrication, and characterization of a 220 GHz superconducting transition edge sensor (TES) array developed for ground-based cosmic microwave background (CMB) experiments. Unlike conventional TES arrays adopting thermometers made of bilayer superconducting films, the TES array has thermometers made of simpler single-layer titanium (Ti) film deposited on a suspended silicon nitride (SiN x) membrane. The thermal weak link is realized by releasing the TES's thermal island including the Ti thermometer by dry etching with xenon difluoride (XeF2), giving a typical thermal conductance of 25 pW K−1. Its thermal-conductance mechanism is further studied by fitting the measured TES's complex impedance with a three-block thermal model. The dark and optical noise equivalent power (NEP) of a superconducting TES are both measured. Despite existing lens reflection and dielectric loss in the superconducting microstrip line, its typical optical NEP reaches 100 aW Hz−0.5, which meets the sensitivity requirement for ground-based CMB experiments. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
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