| Autor: |
Lisenko, Nikita, Shen, Bonan, Park, Jayoung, Song, Ruobing, Im, James S. |
| Předmět: |
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| Zdroj: |
SID Symposium Digest of Technical Papers; Jun2023, Vol. 54 Issue 1, p1466-1469, 4p |
| Abstrakt: |
To experimentally investigate the intrinsic nature of how melting initiates and propagates in laser annealing processes involving polycrystalline thin films, polycrystalline Si obtained by ELA was planarized and then single‐pulse irradiated at various energy densities. AFM analysis of the irradiated films reveals definitively that melting initiates predominantly at grain‐boundary vertices and junctions. Important implications for ELA and SBA (Spot‐Beam‐ Annealing) methods are discussed. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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