Detonation Technology in Producing Metal–Ceramic Powder Targets for Magnetron Sputtering.

Autor: Sirota, V. V., Zaitsev, S. V., Prokhorenkov, D. S., Limarenko, M. V., Skiba, A. A., Kovaleva, M. G.
Zdroj: Russian Engineering Research; Jun2023, Vol. 43 Issue 6, p735-738, 4p
Abstrakt: An innovative approach is proposed to the production of plane and cylindrical composite metal–ceramic targets (cathodes) for magnetron sputtering: the use of high-frequency multichamber detonating accelerators. Powder composites are produced from Russian industrial metallic and ceramic powders and then used to produce dense metal–ceramic coatings by detonation spraying on the surface of plane and cylindrical copper substrates. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index