Erratum: "Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?" [J. Vac. Sci. Technol. B 41, 030803 (2023)].

Autor: Magee, Charles W., Buyuklimanli, Temel H.
Předmět:
Zdroj: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2023, Vol. 41 Issue 4, p1-2, 2p
Abstrakt: Erratum: "Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?" The error is only in this figure, and discussions and conclusions in the article are unaffected. Error in using the B RSF calculated from a Si standard and the error when using PCOR-SIMSSM vs Ge content. [Extracted from the article]
Databáze: Complementary Index