Nanoscale multi-beam lithography of photonic crystals with ultrafast laser.
| Autor: | Li, Jiaqun, Yan, Jianfeng, Jiang, Lan, Yu, Jiachen, Guo, Heng, Qu, Liangti |
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| Zdroj: | Light: Science & Applications; 7/4/2023, Vol. 12 Issue 1, p1-12, 12p |
| Databáze: | Complementary Index |
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