| Autor: |
Il'in, A. S., Maksimov, A. I., Moshnikov, V. A., Yaroslavtsev, N. P. |
| Předmět: |
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| Zdroj: |
Semiconductors; Mar2005, Vol. 39 Issue 3, p281-284, 4p |
| Abstrakt: |
A method for the efficient monitoring of the existence and composition of encapsulated nanophases in nanostructured thin films grown using sol–gel technology is suggested. The method is used to study the semiconductor film structures intended for gas-sensitive adsorption sensors. The potential for, and prospects of, studying materials and diagnosing sol–gel processes using this method are considered. © 2005 Pleiades Publishing, Inc. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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