The novel materials for pattern growing on EUV resists.
| Autor: | Yanagita, Hiroshi, Yamamoto, Kazuma |
|---|---|
| Zdroj: | Proceedings of SPIE; 4/11/2023, Vol. 12498, p124981C-124981C-4, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Yanagita, Hiroshi, Yamamoto, Kazuma |
|---|---|
| Zdroj: | Proceedings of SPIE; 4/11/2023, Vol. 12498, p124981C-124981C-4, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|