Indium nitrate hydrate films as EUV resists by evaluating with 92-eV electron beam.
| Autor: | Grayson, Jesse, Valdez, Marisol, Xu, Weijie, Hsu, Julia W. P. |
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| Zdroj: | Proceedings of SPIE; 4/11/2023, Vol. 12498, p1249811-1249811, 1p |
| Databáze: | Complementary Index |
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