A novel formulated developer for negative-tone imaging with EUV exposure to improve chemical stochastic.
| Autor: | Ou, Keiyu, Tango, Naohiro, Fujimaki, Nishiki, Marumo, Kazuhiro, Hiura, Nobuhiro, Takahashi, Satomi, Fujimori, Toru |
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| Zdroj: | Proceedings of SPIE; 4/11/2023, Vol. 12498, p124980D-124980D-7, 1p |
| Databáze: | Complementary Index |
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