Novel approach of patterning technologies enabling monolithic micro-optical components.
| Autor: | Wolf, J., Ferstl, M., Voigt, A., Grützner, S., Schleunitz, A., Grützner, G. |
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| Zdroj: | Proceedings of SPIE; 4/10/2023, Vol. 12497, p124970F-124970F-11, 1p |
| Databáze: | Complementary Index |
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