Design-aware virtual metrology and process recipe recommendation.
| Autor: | Greeneltch, Nathan G., Yin, Haizhou, Torres, J. Andres, Tao, Melody, Lubin, Steven M., Jayaram, Srividya, Kissiov, Ivan, Niehoff, Martin, Wolf, Marcus, Jungmann, Paul, Bailey, Todd C. |
|---|---|
| Zdroj: | Proceedings of SPIE; 4/8/2023, Vol. 12495, p124951V-124951V-6, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|