Scalable hierarchy extraction of repeating structures to enhance full chip mask synthesis.
| Autor: | Zhu, Jun, Wang, Lin, Falch, Brad, Dam, Thuc, Wang, Yongdong, Panaite, Petrisor, Ji, Mingchao, Li, Yuan Yuan, Su, Ming |
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| Zdroj: | Proceedings of SPIE; 4/8/2023, Vol. 12495, p124950X-124950X-9, 1p |
| Databáze: | Complementary Index |
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