EUV SRAFs printing modeling and verification in 2D hole array.
| Autor: | Tan, Ling Ee, Wei, Chih-I, Yin, Lianghoon, Latypov, Azat, Wang, Shuling, Sriram, Satya, Deep, Prakash, Shahidi, Farruh, Shang, Shumay, Fenger, Germain, Hong, Le, Gillijns, Werner |
|---|---|
| Zdroj: | Proceedings of SPIE; 4/7/2023, Vol. 12494, p1249417-1249417, 1p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|