Color control of titanium nitride thin films.

Autor: Ontoria, Aian B., Vasquez Jr., Magdaleno R.
Předmět:
Zdroj: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2023, Vol. 41 Issue 3, p1-6, 6p
Abstrakt: Titanium nitride (TiN) films were deposited on 304 stainless steel substrates using a radio frequency-powered magnetron sputtering system. The influence of the argon:nitrogen gas ratio (90:10, 80:20, 70:30) and the substrate temperature (room temperature, 200 ° C, 400 ° C) were investigated. X-ray diffractograms revealed a crystal orientation along the (111) plane with lattice parameters ranging from 4.268 to 4.319 Å. Colorimetric analysis of the deposited films revealed a color difference (Δ E a b ∗) from actual gold that ranged from 2.6 to 33.2. The hardness data of the TiN-coated (Δ E a b ∗ = 2.6) revealed a 53% increase compared to the bare substrates. 300-h salt spray test showed no significant corrosion for the TiN-coated substrates. With a gold-like finish coupled with excellent mechanical properties, the TiN films can be used as a durable decorative coating for the creative industries. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index