Особливості структуроутворення тонких плівок міді та визначення їхніх плазмонно-резонансних властивостей

Autor: Барабаш, М. Ю., Колесніченко, А. А., Леонов, Д. С., Литвин, Р. В., Сезоненко, А. Ю., Лук'яненко, І. В., Биба, Є. Г., Ямшинський, М. М., Бобошко, Є. М.
Zdroj: Metallophysics & Advanced Technologies / Metallofizika i Novejsie Tehnologii; Feb2023, Vol. 45 Issue 2, p169-182, 14p
Abstrakt: The main task of the work was to determine the peculiarities of structure formation of the copper films with a thickness of 100-300 nm on glass substrates obtained by thermal sputtering and to study the effects of optical resonances in thin metal copper films using absorption and Raman scattering spectra. The research of the atomic crystal structure of thin copper films was carried out using X-ray diffractometry. The formation mechanism of insular thin films was analysed. The result of the structure transformation is determined by the interaction energy of atoms in film with each other and with the substrate, as well as physical and technological parameters of condensation and subsequent processing regime of deposition and annealing. Optical resonances of copper films on glass substrates were identified using absorption and Raman scattering spectra. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index