Fully integrated Laser Doppler Vibrometer (LDV) based on hybrid 3D integration of silicon nitride and polymer photonic circuits with operation in the kHz regime.
| Autor: | Raptakis, A., Gounaridis, L., Kleinert, M., Weigel, M., Epping, J. P., Schreuder, E., Wolfer, M., Draebenstedt, A., Pessina, R., Groumas, P., Aukes, T., Seyfried, V., Keil, N., Heideman, R., Avramopoulos, H., Kouloumentas, C. |
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| Zdroj: | Proceedings of SPIE; 1/27/2023, Vol. 12424, p124240A-124240A-8, 1p |
| Databáze: | Complementary Index |
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